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Vacuum Roll to Roll double-sided Sputtering & E/B Evaporation combined systerm

Substrate Material

PET/PP 3μm12μm

 

Width1350mmeffective deposition width1300mm)

Line Speed

15m/minon each side 1μm x both sides

 

Production capacityabout 710,000/month 

Specification of coating

150KW EB GUN 4set

 

Operating air pressure0.0050.01Pa

Surface treatment

Ion Bomberdment

Membrane performance

Membrane composition: adhesion layer (SP)/electrode layer Cu (evaporation)/protective layer (SP)

 

Thickness distribution:±10

 

Membrane resistance25mΩ□

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