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Vacuum Roll to Roll double-sided Sputtering System

Substrate Material

PET/PP 3μm12μm

Width1350mmeffective deposition width1300mm)

Line Speed

2m/minon each side 1μm x both sides

Production capacityabout 95,000/month 

Specification of coating

Rotary Magnetron Sputtering Cathode 32set

Operating air pressure0.51.0Pa

Surface treatment

Heater or Ion Bomberdment

Membrane performance

Membrane composition: adhesion layer (SP)/electrode layer Cu (evaporation)/protective layer (SP)

Thickness distribution:±5%

Membrane resistance25mΩ□



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